Nanusens, the three year-old Barcelona sensor company, says its CMOS nano-sensor technology has solved the problem of stiction in MEMS inertial sensors.
“Our first silicon nano-sensor samples from GLOBALFOUNDRIES exceeded our expectations showing outstanding resilience to stiction, with the devices going through more than 10,000 switching cycles, each equivalent to more than 1000G shocks,” says Nanusens’ CEO, Dr Josep Montanyà i Silvestre. “and the sensitivity is an order of magnitude above what is needed for a motion sensor in most applications.”
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