“Our first silicon nano-sensor samples from GLOBALFOUNDRIES exceeded our expectations showing outstanding resilience to stiction, with the devices going through more than 10,000 switching cycles, each equivalent to more than 1000G shocks,” says Nanusens’ CEO, Dr Josep Montanyà i Silvestre. “and the sensitivity is an order of magnitude above what is needed for a motion sensor in most applications.”
The problem of stiction in MEMS is caused by attractive forces that occur on microscopic levels such as Van der Waals and Casimir.
These are surface area dependant and not mass dependant. In an inertial sensor design, there is a proof mass connected to a spring.
This mass moves when there is an acceleration and the movement is detected by the mass acting as one electrode and the change in capacitance is measured relative to a second fixed electrode.
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